High aspect ratio silicon ring-shape micropillars fabricated by deep reactive ion etching with sacrificial structures - ScienceDirect
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Deep Reactive Ion Etching (DRIE) - Oxford Instruments
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Optimization of deep reactive ion etching for microscale silicon
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Wet scandium etching for hard mask formation on a silicon substrate - ScienceDirect
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High aspect ratio silicon and polyimide nanopillars by combination
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Deep reactive ion etching - ScienceDirect
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Fabrication of high-aspect ratio silicon nanopillars for
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Wafer-scale 3D shaping of high aspect ratio structures by multistep plasma etching and corner lithography
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Figure 1 from Ultra Deep Reactive Ion Etching of High Aspect-Ratio
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